메뉴 건너뛰기




Volumn 26, Issue 5, 2011, Pages 555-560

Growth and transport properties of layered bismuth telluride thin films via radio frequency magnetron sputtering

Author keywords

Bismuth telluride; Radio frequency magnetron sputtering; Thermoelectric properties; Thin film

Indexed keywords

BISMUTH TELLURIDE; BISMUTH TELLURIDE THIN FILMS; CHEMICAL COMPOSITIONS; ELECTRICAL TRANSPORT PROPERTIES; ENERGY DISPERSIVE; HIGH TEMPERATURE; KEY FACTORS; LAYERED NANOSTRUCTURE; POWER FACTORS; RADIO FREQUENCY MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPES; SUBSTRATE TEMPERATURE; THERMOELECTRIC PROPERTIES; VARIOUS SUBSTRATES;

EID: 79958235676     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: 10.3724/SP.J.1077.2011.11030     Document Type: Article
Times cited : (5)

References (33)
  • 3
    • 0033618637 scopus 로고    scopus 로고
    • Thermoelectric cooling and power generation
    • DiSalvo F J. Thermoelectric cooling and power generation. Science, 1999, 285(5428): 703-706.
    • (1999) Science , vol.285 , Issue.5428 , pp. 703-706
    • DiSalvo, F.J.1
  • 4
    • 0033524841 scopus 로고    scopus 로고
    • Thermoelectric materials-holey and unholy semiconductors
    • Tritt T M. Thermoelectric materials-holey and unholy semiconductors. Science, 1999, 283(5403): 804-805.
    • (1999) Science , vol.283 , Issue.5403 , pp. 804-805
    • Tritt, T.M.1
  • 5
    • 0842309885 scopus 로고    scopus 로고
    • Thermoelectricity in semiconductor nanostructures
    • Majumdar A. Thermoelectricity in semiconductor nanostructures. Science, 2004, 303(5659): 777-778.
    • (2004) Science , vol.303 , Issue.5659 , pp. 777-778
    • Majumdar, A.1
  • 6
    • 0001173915 scopus 로고
    • Effect of quantum-well structures on the thermoelectric figure of merit
    • Hicks L D, Dresselhaus M S. Effect of quantum-well structures on the thermoelectric figure of merit. Phys. Rev. B, 1993, 47(19): 12727-12731.
    • (1993) Phys. Rev. B , vol.47 , Issue.19 , pp. 12727-12731
    • Hicks, L.D.1    Dresselhaus, M.S.2
  • 7
    • 18144397257 scopus 로고    scopus 로고
    • Reversible thermoelectric nanomaterials
    • Humphrey T E, Linke H. Reversible thermoelectric nanomaterials. Phys. Rev. Lett., 2005, 94(9): 096601-1-4.
    • (2005) Phys. Rev. Lett. , vol.94 , Issue.9
    • Humphrey, T.E.1    Linke, H.2
  • 8
    • 20444499413 scopus 로고    scopus 로고
    • Thermoelectric figure of merit of II-VI semiconductor nanowires
    • Mingo N. Thermoelectric figure of merit of II-VI semiconductor nanowires. Appl. Phys. Lett., 2004, 85(24): 5986-5988.
    • (2004) Appl. Phys. Lett. , vol.85 , Issue.24 , pp. 5986-5988
    • Mingo, N.1
  • 9
    • 0035846181 scopus 로고    scopus 로고
    • Thin-film thermoelectric devices with high room-temperature figures of merit
    • Venkatasubramanian R, Siivola E, Colpitts T, et al. Thin-film thermoelectric devices with high room-temperature figures of merit. Nature, 2001, 413(6856): 597-602.
    • (2001) Nature , vol.413 , Issue.6856 , pp. 597-602
    • Venkatasubramanian, R.1    Siivola, E.2    Colpitts, T.3
  • 10
    • 0037083413 scopus 로고    scopus 로고
    • Thermoelectric materials-smaller is cooler
    • Sales B C. Thermoelectric materials-smaller is cooler. Science, 2002, 295(5558): 1248-1249.
    • (2002) Science , vol.295 , Issue.5558 , pp. 1248-1249
    • Sales, B.C.1
  • 11
    • 34250689394 scopus 로고    scopus 로고
    • New directions for low-dimensional thermoelectric materials
    • Dresselhaus M S, Chen G, Tang M Y, et al. New directions for low-dimensional thermoelectric materials. Adv. Mater., 2007, 19(8): 1043-1053.
    • (2007) Adv. Mater. , vol.19 , Issue.8 , pp. 1043-1053
    • Dresselhaus, M.S.1    Chen, G.2    Tang, M.Y.3
  • 12
    • 38849174818 scopus 로고    scopus 로고
    • Complex thermoelectric materials
    • Snyder G J, Toberer E S. Complex thermoelectric materials. Nature Mater., 2008, 7(2): 105-114.
    • (2008) Nature Mater. , vol.7 , Issue.2 , pp. 105-114
    • Snyder, G.J.1    Toberer, E.S.2
  • 13
    • 42149141256 scopus 로고    scopus 로고
    • 3 bulk nanocomposites with laminated nanostructure
    • 3 bulk nanocomposites with laminated nanostructure. Appl. Phys. Lett., 2008, 92(14): 143106-1-3.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.14
    • Cao, Y.Q.1    Zhao, X.B.2    Zhu, T.J.3
  • 14
    • 62549163432 scopus 로고    scopus 로고
    • Unique nanostructures and enhanced thermoelectric performance of melt-spun BiSbTe alloys
    • Xie W J, Tang X F, Yan Y G, et al. Unique nanostructures and enhanced thermoelectric performance of melt-spun BiSbTe alloys. Appl. Phys. Lett., 2009, 94(10): 102111-1-3.
    • (2009) Appl. Phys. Lett. , vol.94 , Issue.10
    • Xie, W.J.1    Tang, X.F.2    Yan, Y.G.3
  • 16
    • 0043287304 scopus 로고    scopus 로고
    • Thermoelectric microdevice fabricated by a MEMS-like electrochemical process
    • Snyder G J, Lim J R, Huang C K, et al. Thermoelectric microdevice fabricated by a MEMS-like electrochemical process. Nature Mater., 2003, 2(8): 528-531.
    • (2003) Nature Mater. , vol.2 , Issue.8 , pp. 528-531
    • Snyder, G.J.1    Lim, J.R.2    Huang, C.K.3
  • 17
    • 64449083272 scopus 로고    scopus 로고
    • On-chip cooling by superlattice-based thin-film thermoelectric
    • Chowdhury I, Prasher R, Lofgreen K, et al. On-chip cooling by superlattice-based thin-film thermoelectric. Nature Nanotech., 2009, 4(4): 235-238.
    • (2009) Nature Nanotech. , vol.4 , Issue.4 , pp. 235-238
    • Chowdhury, I.1    Prasher, R.2    Lofgreen, K.3
  • 20
    • 67650242374 scopus 로고    scopus 로고
    • Thermoelectric properties of Bi-Te films with controlled structure and morphology
    • Bassi A L, Bailini A, Casari C S, et al. Thermoelectric properties of Bi-Te films with controlled structure and morphology. J. Appl. Phys., 2009, 105(12): 124307-1-9.
    • (2009) J. Appl. Phys. , vol.105 , Issue.12
    • Bassi, A.L.1    Bailini, A.2    Casari, C.S.3
  • 21
    • 0030707119 scopus 로고    scopus 로고
    • 3 and their superlattice structures for thin-film thermoelectric applications
    • 3 and their superlattice structures for thin-film thermoelectric applications. J. Crystal Growth, 1997, 170(1-4): 817-821.
    • (1997) J. Crystal Growth , vol.170 , Issue.1-4 , pp. 817-821
    • Venkatasubramanian, R.1    Colpitts, T.2    Watko, E.3
  • 23
    • 20544474712 scopus 로고    scopus 로고
    • Thermoelectric performance of films in the bismuth-tellurium and antimony-tellurium systems
    • da Silva L W, Kaviany M, Uher C. Thermoelectric performance of films in the bismuth-tellurium and antimony-tellurium systems. J. Appl. Phys., 2005, 97(11): 114903-1-10.
    • (2005) J. Appl. Phys. , vol.97 , Issue.11
    • da Silva, L.W.1    Kaviany, M.2    Uher, C.3
  • 24
    • 34247217486 scopus 로고    scopus 로고
    • Thermoelectric properties of n-type nanocrystalline bismuth-telluride-based thin films deposited by flash evaporation
    • Takashiri M, Takiishi M, Tanaka S, et al. Thermoelectric properties of n-type nanocrystalline bismuth-telluride-based thin films deposited by flash evaporation. J. Appl. Phys., 2007, 101(7): 074301-1-6.
    • (2007) J. Appl. Phys. , vol.101 , Issue.7
    • Takashiri, M.1    Takiishi, M.2    Tanaka, S.3
  • 27
    • 45749110308 scopus 로고    scopus 로고
    • 3 superlattice thin films via electrochemical atomic layer epitaxy
    • 3 superlattice thin films via electrochemical atomic layer epitaxy. Langmuir, 2008, 24(11): 5919-5924.
    • (2008) Langmuir , vol.24 , Issue.11 , pp. 5919-5924
    • Zhu, W.1    Yang, J.Y.2    Zhou, D.X.3
  • 28
    • 33646409860 scopus 로고    scopus 로고
    • Effect of deposition temperature on the structural and thermoelectric properties of bismuth telluride thin films grown by co-sputtering
    • Kim D H, Byon E, Lee G H, et al. Effect of deposition temperature on the structural and thermoelectric properties of bismuth telluride thin films grown by co-sputtering. Thin Solid Films, 2006, 510(1/2): 148-153.
    • (2006) Thin Solid Films , vol.510 , Issue.1-2 , pp. 148-153
    • Kim, D.H.1    Byon, E.2    Lee, G.H.3
  • 29
    • 64349105220 scopus 로고    scopus 로고
    • Influence of annealing on thermoelectric properties of bismuth telluride films grown via radio frequency magnetron sputtering
    • Huang H, Luan W L, Tu S T. Influence of annealing on thermoelectric properties of bismuth telluride films grown via radio frequency magnetron sputtering. Thin Solid Films, 2009, 517(13): 3731-3734.
    • (2009) Thin Solid Films , vol.517 , Issue.13 , pp. 3731-3734
    • Huang, H.1    Luan, W.L.2    Tu, S.T.3
  • 30
    • 33745678506 scopus 로고    scopus 로고
    • Effect of rapid thermal annealing on thermoelectric properties of bismuth telluride films grown by co-sputtering
    • Kim D H, Lee G H. Effect of rapid thermal annealing on thermoelectric properties of bismuth telluride films grown by co-sputtering. Mater. Sci. Eng. B, 2006, 131(1/2/3): 106-110.
    • (2006) Mater. Sci. Eng. B , vol.131 , Issue.1-3 , pp. 106-110
    • Kim, D.H.1    Lee, G.H.2
  • 31
    • 34547662845 scopus 로고    scopus 로고
    • Preparation of bismuth telluride thin films through interfacial reaction
    • Liao C N, She T H. Preparation of bismuth telluride thin films through interfacial reaction. Thin Solid Films, 2007, 515(20/21): 8059-8064.
    • (2007) Thin Solid Films , vol.515 , Issue.20-21 , pp. 8059-8064
    • Liao, C.N.1    She, T.H.2
  • 32
    • 54049156885 scopus 로고    scopus 로고
    • Effects of wetting and misfit strain on the pattern formation of heteroepitaxially grown thin films
    • Guo J Y, Zhang Y W, Lu C. Effects of wetting and misfit strain on the pattern formation of heteroepitaxially grown thin films. Comp. Mater. Sci., 2008, 44(1): 174-179.
    • (2008) Comp. Mater. Sci. , vol.44 , Issue.1 , pp. 174-179
    • Guo, J.Y.1    Zhang, Y.W.2    Lu, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.