Chemical tailoring of hybrid sol-gel thick coatings as hosting matrix for functional patterned microstructures

ACS Applied Materials and Interfaces

Volumn 3, Issue 2, 2011, Pages 245-251

  Falcaro, Paolo ^a   Costacurta, Stefano ^b   Malfatti, Luca ^c   Buso, Dario ^a,d   Patelli, Alessandro ^b   Schiavuta, Piero ^b   Piccinini, Massimo ^e   Grenci, Gianluca ^f   Marmiroli, Benedetta ^g   Amenitsch, Heinz ^g   Innocenzi, Plinio ^e  

^a CSIRO   (Australia)

^b Associazione CIVEN Nano Fabrication Facility   (Italy)

^c UNIVERSITY OF SASSARI   (Italy)

^d SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^e Porto Conte Ricerche Srl   (Italy)

^f LABORATORIO TASC   (Italy)

^g ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

Author keywords

Acene; Fullerenes; Hybrid materials; Lithography; Sol gel films

Indexed keywords

ACENE; CHEMICAL ETCHING; CHEMICAL TAILORING; FUNCTIONAL COATING; FUNCTIONAL MOLECULES; HARD X RAY; HIGH ASPECT RATIO; HIGH ENERGY PHOTONS; HIGH HOMOGENEITY; HIGH QUALITY; HYBRID SOL-GEL; LASER SCANNER; LITHOGRAPHY PROCESS; MATRIX; OPTICAL PROFILOMETER; PATTERNED MICROSTRUCTURES; PENTACENES; SHARP EDGES; SOL-GEL FILMS; THICK COATINGS; TWO-STEP PROCESS;

ASPECT RATIO; FULLERENES; GELS; HARD COATINGS; HYBRID MATERIALS; HYDROCARBONS; INORGANIC COATINGS; MICROSTRUCTURE; POLYCYCLIC AROMATIC HYDROCARBONS; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; SOL-GEL PROCESS; SOL-GELS; SOLS; THICK FILMS; X RAYS;

LITHOGRAPHY;

FULLERENE DERIVATIVE; POLYCYCLIC AROMATIC HYDROCARBON;

ARTICLE; CHEMISTRY; GEL; INFRARED SPECTROSCOPY; INSTRUMENTATION; METHODOLOGY; MICROTECHNOLOGY; PARTICLE SIZE; RAMAN SPECTROMETRY;

FULLERENES; GELS; MICROTECHNOLOGY; PARTICLE SIZE; POLYCYCLIC HYDROCARBONS, AROMATIC; SPECTROSCOPY, FOURIER TRANSFORM INFRARED; SPECTRUM ANALYSIS, RAMAN;

EID: 79957971762     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am100901m     Document Type: Article

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