Fabrication of microlens arrays by a rolling process with soft polydimethylsiloxane molds

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Hu, Chia Nying ^a   Hsieh, Hsin Ta ^a   Su, Guo Dung John ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS SUBSTRATES; LOW COSTS; MASTER MOLDS; METAL MOLD; MICRO-LENS ARRAYS; PDMS MOLDS; POLYDIMETHYLSILOXANE PDMS; PRINTING MACHINES; ROLL TO ROLL; ROLLING PRESSURE; ROLLING PROCESS; SILICON SUBSTRATES; SPIN COATERS; THERMAL REFLOW PROCESS; ULTRA-VIOLET LIGHT; VISIBLE LIGHT; YIELD RATES;

GLASS; MICROCHANNELS; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; PHOTORESISTS; RESINS; ROLLING RESISTANCE; SILICONES; SUBSTRATES; ULTRAVIOLET RADIATION;

MOLDS;

EID: 79957967223     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065013     Document Type: Article

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