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Journal of Applied Physics

Volumn 107, Issue 11, 2010, Pages

Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride

(2) Qin, Lifeng a Wang, Qing Ming a

a University of Pittsburgh (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC VELOCITY; BULK WAVES; C-AXIS ORIENTATIONS; DIELECTRIC CONSTANTS; DUAL MODES; ELASTIC STIFFNESS; ELECTRIC POLARIZATION; ELECTRICAL IMPEDANCE; ELECTROMECHANICAL COUPLING COEFFICIENTS; FREQUENCY CONTROL; IN-PLANE; LONGITUDINAL MODES; MATERIAL PROPERTY; MAXIMUM VALUES; PIEZOELECTRIC COEFFICIENT; PURE SHEAR; THICKNESS SHEAR MODES; THIN FILM BULK ACOUSTIC RESONATOR; THIN FILM RESONATORS; TILT ANGLE; WURTZITE GAN; WURTZITES;

ACOUSTIC IMPEDANCE; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; FILM THICKNESS; GALLIUM ALLOYS; GALLIUM NITRIDE; PIEZOELECTRICITY; RESONATORS; THIN FILMS; VAPOR DEPOSITION; ZINC SULFIDE;

ACOUSTIC RESONATORS;

EID: 77953625789 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3427434 Document Type: Article

Times cited : (19)

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