Efficient nitrogen incorporation into amorphous carbon films by double beam method

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 970-974

  Hayashi, Yasuhiko ^a   Kamio, T ^a   Soga, T ^a   Kaneko, K ^b   Jimbo, T ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

Amorphous carbon films; Conductivity; Double beam method; Nitrogen incorporation

Indexed keywords

ACTIVATION ENERGY; CARBON; ELECTRIC CONDUCTIVITY; FILM GROWTH; METHANE; NITROGEN; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON FILMS; CONDUCTIVITY; DOUBLE BEAM METHOD (DBM); NITROGEN INCORPORATION;

AMORPHOUS FILMS;

EID: 18444376210     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.01.003     Document Type: Conference Paper

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