Surface evaluation of fluorinated diamond-like carbon thin film as an antisticking layer of nanoimprint mold

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 9 B, 2007, Pages 6373-6374

  Yamada, Noriko ^a   Nakamatsu, Ken Ichiro ^a   Kanda, Kazuhiro ^a   Haruyama, Yuichi ^a   Matsui, Shinji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Antisticking layer; Contact angle; Fluorinated diamond like carbon; Nanoimprint mold; X ray photoelectron spectrum

Indexed keywords

CONTACT ANGLE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ANTISTICKING LAYER; FLUORINATED DIAMOND-LIKE CARBON; NANOIMPRINT MOLD; X-RAY PHOTOELECTRON SPECTRUM;

DIAMOND LIKE CARBON FILMS;

EID: 34648833018     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6373     Document Type: Article

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