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Volumn 7971, Issue , 2011, Pages
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Optical illumination optimization for patterned defect inspection
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Author keywords
bright field microscopy; dark field microscopy; Defect detection; illumination optimization; Scatterfield optical microscopy
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Indexed keywords
BRIGHT-FIELD MICROSCOPY;
DARK-FIELD MICROSCOPY;
DEFECT DETECTION;
ILLUMINATION OPTIMIZATION;
SCATTERFIELD OPTICAL MICROSCOPY;
INSPECTION;
MEASUREMENTS;
OPTICAL MICROSCOPY;
OPTIMIZATION;
POLARIZATION;
PROCESS CONTROL;
SEMICONDUCTOR DEVICES;
UNITS OF MEASUREMENT;
DEFECTS;
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EID: 79956113803
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.882313 Document Type: Conference Paper |
Times cited : (11)
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References (8)
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