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1
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0026387290
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Grating line shape characterization using scatterometry
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K. P. Bishop, S. M. Gaspar, L. M. Milner, S. Sohail, H. Naqvi and J. R. McNeil, "Grating line shape characterization using scatterometry, " Proc. SPIE 1545, 64 (1991).
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Bishop, K.P.1
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Mcneil, J.R.6
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2
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51749111775
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Optical through-focus technique that differentiates small changes in line width, line height and sidewall angle for CD, overlay, and defect metrology applications
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R. Attota, Richard Silver, and B. M. Barnes, "Optical through-focus technique that differentiates small changes in line width, line height and sidewall angle for CD, overlay, and defect metrology applications, " Proc. SPIE 6922, 6922E-1 (2008).
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Attota, R.1
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3
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Scatterfield microscopy using back focal plane imaging with an engineered illumination field
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H. J. Patrick, R. Attota, B. M. Barnes, T. A. Germer, M. T. Stocker, R. M. Silver, M. R. Bishop, "Scatterfield microscopy using back focal plane imaging with an engineered illumination field, " Proc. SPIE 6152, 61520J (2006).
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Patrick, H.J.1
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4
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40749137817
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Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy
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Heather J. Patrick, Ravikiran Attota, Bryan M. Barnes, Thomas A. Germer, Ronald G. Dixson, Michael T. Stocker, Richard M. Silver, and Michael R. Bishop, "Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy, " J. Micro/Nanolith. MEMS MOEMS 7, 013012 (2008).
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Silver, R.M.7
Bishop, M.R.8
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5
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66649138769
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Angle resolved optical metrology
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R. M. Silver, B. M. Barnes, A. Heckert, R. Attota, R. Dixson and J. Jun, "Angle resolved optical metrology, " Proc. SPIE 6922, 69221M (2008).
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Silver, R.M.1
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6
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35148858951
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Kohler illumination analysis for high-resolution optical metrology using 193 nm light
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Y. J. Sohn, Richard M. Silver, "Kohler illumination analysis for high-resolution optical metrology using 193 nm light, " Proc. SPIE 6518, 65184V (2007).
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Sohn, Y.J.1
Silver, R.M.2
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7
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70449681443
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Analysis of köhler illumination for 193 nm scatterfield microscope
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Y. J. Sohn, R. Quintanilha, Lowell Howard, and R. M. Silver, "Analysis of Köhler illumination for 193 nm scatterfield microscope, " Proc. SPIE 7272, 72723T (2009).
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Sohn, Y.J.1
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8
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Critical dimension measurements using a 193 nm scatterfield microscope
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R. Quintanilha, Y. Sohn, B. M. Barnes, L. Howard, and R. Silver "Critical dimension measurements using a 193 nm scatterfield microscope, " Proc. SPIE 7390, 73900S (2009).
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Quintanilha, R.1
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10
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66649112487
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Through-focus scanning and scatterfield optical methods for advanced overlay targets analysis
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R. Attota, M. Stocker, R. Silver, A. Heckert, H. Zhou, R. Kasica, L. Chen, R. Dixson, G. Orji, B. Barnes and P. Lipscomb, "Through-focus scanning and scatterfield optical methods for advanced overlay targets analysis, " Proc. SPIE 7272, 727214 (2009).
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Attota, R.1
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Chen, L.7
Dixson, R.8
Orji, G.9
Barnes, B.10
Lipscomb, P.11
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