Characterization of thin-film aerogel porosity and stiffness with laser-generated surface acoustic waves

Thin Solid Films

Volumn 388, Issue 1-2, 2001, Pages 1-4

  Flannery, C M ^a   Murray, C ^b   Streiter, I ^b   Schulz, S E ^b  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Dielectric properties; Elastic properties; Porous silica; Surface acoustic waves; Xerogels

Indexed keywords

ACOUSTIC WAVES; ELASTIC MODULI; LASER APPLICATIONS; PERMITTIVITY; POROSITY; POROUS MATERIALS; SILICA; STIFFNESS; THIN FILMS;

LASER-GENERATED SURFACE ACOUSTIC WAVES; NANOPOROUS SILICA AEROGEL FILMS;

AEROGELS;

EID: 0035372136     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00827-6     Document Type: Article

References (16)

1. Advanced metallization and interconnect systems for ULSI applications in 1997