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Applied Physics Letters

Volumn 80, Issue 1, 2002, Pages 22-24

Control and mass selection of CnHm+ fragments in an inductively coupled pulsed plasma

(4) Zeze, D A a Joyce, A M b Anderson, C A b Brown, N M D b

a UNIVERSITY OF SURREY (United Kingdom)

b UNIVERSITY OF ULSTER (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ADAMANTANES; DEPOSITION REGIMES; INDUCTIVELY-COUPLED; MASS SELECTION; POST-DEPOSITION; PULSE CONTROL; PULSED PLASMA; SPECTROMETRIC DATA;

HYDROCARBONS; INDUCTIVELY COUPLED PLASMA; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA DEPOSITION;

EID: 79956007650 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1428776 Document Type: Article

Times cited : (4)

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