Studies on structural properties of a-CN:H films prepared in electron cyclotron resonance plasma

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 586-590

  Bhattacharyya, S ^a   Vallee C ^a   Cardinaud, C ^a   Turban, G ^a  

^a INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

Author keywords

Nitrides; Photo electron spectroscopy; Plasma; Raman spectroscopy

Indexed keywords

ACETYLENE; ELECTRON CYCLOTRON RESONANCE; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; ELLIPSOMETRY; GRAPHITE; NITRIDES; NITROGEN; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE;

AMORPHOUS FILMS;

EID: 0032607177     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00310-0     Document Type: Review

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