Investigation of the uniformity and coverage of CxNy: H overcoatings during PECVD in an inductively coupled plasma

Surface and Interface Analysis

Volumn 29, Issue 3, 2000, Pages 201-207

  Zeze, D A ^a   North, D R ^a   Brown, N M D ^a   Anderson, C A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

AES; CN; Raman; SEM; XPS

Indexed keywords

EID: 0343158891     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(200003)29:3<201::AID-SIA686>3.0.CO;2-W     Document Type: Article

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