Effects of substrate bias voltage on plasma parameters in temperature control using a grid system

Physics of Plasmas

Volumn 8, Issue 9, 2001, Pages 4246-

  Bai, K H ^a   Hong, J I ^a   You, S J ^a   Chang, H Y ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

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EID: 0035447747     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1395571     Document Type: Article

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