Electron temperature analysis of two-gas-species inductively coupled plasma

Applied Physics Letters

Volumn 79, Issue 11, 2001, Pages 1596-1598

  Bai, K H ^a   Chang, H Y ^a   Uhm, H S ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035839930     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1404135     Document Type: Article

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