Diagnosis of positive ions from the near-cathode region in a high-voltage pulsed corona discharge N2 plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2213-2216

  Tang, Shukai ^a   Wang, Wenchun ^a   Liu, Jiahong ^a   Yang, Xuefeng ^a   Wu, Yan ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE INTERFERENCE; MASS SPECTROMETERS; MOLECULAR BEAMS; NITROGEN; POSITIVE IONS;

CORONA DISCHARGES; NITROGEN PLASMAS;

PLASMA DIAGNOSTICS;

EID: 0034272569     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1286362     Document Type: Article

References (13)

1. J.-S. Chang, P. A. Lawless, and T. Yamamoto, IEEE Trans. Plasma Sci. 19, 1152 (1991).
2. Nonthermal Plasma Techniques for Pollution Control, edited by B. M. Penetrante and S. E. Scultheis (Springer, Berlin, 1993), Parts A and B.
3. G. Dinelli, L. Civitano, and M. Rea, IEEE Trans. Ind. Appl. 26, 535 (1990).
4. A. Mizuno, K. Shimizu, A. Chakrabarti, L. Dascalescu, and S. Furuta, IEEE Trans. Ind. Appl. 31, 957 (1995).
5. Y. S. Mok and I.-S. Nam, Chem. Eng. Technol. 18, 527 (1999).
6. J. J. Lowke and R. Morrow, IEEE Trans. Plasma Sci. 23, 661 (1995).
7. O. Eichwald, M. Yousfi, A. Hennad, and M. D. Benabdessadok, J. Appl. Phys. 82, 4781 (1997).
8. G. Sathiamoorthy, S. Kalyana, W. C. Finney, R. J. Clark, and B. R. Loke, Ind. Eng. Chem. Res. 38, 1844 (1999).
9. B. Sun, M. Sato, A. Harano, and J. S. Clements, J. Electrost. 43, 115 (1998).
10. W. L. Hsu and D. M. Tung, Rev. Sci. Instrum. 63, 4138 (1992).
11. D. C. Dayton, B. M. Jenkins, S. Q. Turn, R. R. Bakker, R. B. Williams, D. Belle-Oudry, and L. M. Hill, Energy Fuels 13, 860 (1999).
12. H. Ding, J. Liu, Z. Song, and X. Yang, (Chinese) Vac. Sci. Technol. 19, 128 (1999).
13. M. M. Shahion. J. Chem. Phys. 43, 1798 (1965).