Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design

Sensors and Actuators, A: Physical

Volumn 167, Issue 2, 2011, Pages 512-516

  Kang, Jianke ^a,b   Auner, Gregory W ^a  

^a Wayne State University   (United States)

^b Landon IP Inc   (United States)

Author keywords

Average displacement; Backpressure; Finite Element Analysis (FEA); Micropump; Piezoelectrically actuated diaphragm; Stroke volume

Indexed keywords

AVERAGE DISPLACEMENT; BACKPRESSURE; FINITE ELEMENT ANALYSIS (FEA); MICRO PUMP; PIEZOELECTRICALLY ACTUATED DIAPHRAGM; STROKE VOLUME;

FINITE ELEMENT METHOD; PUMPS;

DIAPHRAGMS;

EID: 79955919116     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.01.012     Document Type: Article

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