Development of latent images due to transient free carrier electrons by femtosecond laser pulses and its application to grating shape trimming

Applied Physics Letters

Volumn 90, Issue 1, 2007, Pages

  Kawamura, Ken Ichi ^a   Otsuka, Takukazu ^a   Hirano, Masahiro ^a   Kamiya, Toshio ^b   Hosono, Hideo ^b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DIFFRACTION GRATINGS; ELECTRIC EXCITATION; LASER PULSES; SILICA; SINGLE CRYSTALS;

CARRIER ELECTRONS; FEMTOSECOND LASER PULSES; MICROGRATING STRUCTURES; MICROGRATINGS;

IMAGE ANALYSIS;

EID: 33846060308     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2426963     Document Type: Article

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