"Playing around" with field-effect sensors on the basis of EIS structures, LAPS and ISFETs

Sensors

Volumn 5, Issue 3, 2005, Pages 126-138

  Schöning, Michael J ^a,b  

^a AACHEN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

EIS; Field effect sensor; ISFET; LAPS

Indexed keywords

CHEMICAL DETECTION; ION SENSITIVE FIELD EFFECT TRANSISTORS; MICROFABRICATION; MOLECULAR BIOLOGY; SEMICONDUCTOR DEVICES;

FABRICATION TECHNIQUE; FIELD EFFECT SENSORS; FIELD-EFFECT STRUCTURE; LAPS; MICROFABRICATED SENSORS; SCIENTISTS AND ENGINEERS; SENSOR CONCEPTS; SILICON TECHNOLOGIES;

POTENTIOMETRIC SENSORS;

EID: 33646161193     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s5030126     Document Type: Article

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