Isotope tracing study of GeO desorption mechanism from GeO2/Ge stack using 73Ge and 18O

Japanese Journal of Applied Physics

Volumn 50, Issue 4 PART 2, 2011, Pages

  Wang, Sheng Kai ^a   Kita, Koji ^a,b   Nishimura, Tomonori ^a,b   Nagashio, Kosuke ^a,b   Toriumi, Akira ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION MECHANISM; DIFFUSION KINETICS; INTERFACIAL REACTIONS; ISOTOPE TRACING; METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR; SELF-DIFFUSIVITY; VACANCY DIFFUSION MODEL; VARIOUS SUBSTRATES;

ASSOCIATION REACTIONS; DIFFUSION; FIELD EFFECT TRANSISTORS; ISOTOPES; METALLIC COMPOUNDS; MOS DEVICES; OXYGEN; OXYGEN VACANCIES; REACTION KINETICS; REDOX REACTIONS; SURFACE CHEMISTRY; THERMAL DESORPTION; THERMAL DESORPTION SPECTROSCOPY;

GERMANIUM;

EID: 79955427240     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.04DA01     Document Type: Article

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