Dynamics of solid thin-film dewetting in the silicon-on-insulator system

New Journal of Physics

Volumn 13, Issue , 2011, Pages

  Bussmann, E ^a,c   Cheynis, F ^a   Leroy, F ^a   Muller P ^a   Pierre Louis, O ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b UNIVERSITÉ LYON 1   (France)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; ELECTRONS; FREE ENERGY; SILICA; SILICON ON INSULATOR TECHNOLOGY; SILICON OXIDES; SINGLE CRYSTALS; SURFACE DIFFUSION; THIN FILMS;

DIFFUSION-BASED MODEL; INTERFACIAL FREE ENERGY; KINETIC MONTE CARLO MODEL; LOW ENERGY ELECTRON MICROSCOPY; MORPHOLOGICAL EVOLUTION; SINGLE-CRYSTAL SI; SURFACE FREE ENERGY; THREEDIMENSIONAL (3-D);

SILICON WAFERS;

EID: 79955411331     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/13/4/043017     Document Type: Article

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