Highly sensitive gas sensors on low-cost nanostructured polymer substrates

International Journal of Smart and Nano Materials

Volumn 2, Issue 1, 2011, Pages 1-8

  Huo, Haibin ^a   Ren, Haizhou ^a   Wang, Cong ^a   Shen, Mengyan ^a  

^a University of Massachusetts Lowell   (United States)

Author keywords

Carbon monoxide gas; Nanospike; Soft nanolithography; Thin film sensor; Tin oxide

Indexed keywords

CARBON FILMS; CARBON MONOXIDE; CHEMICAL SENSORS; COSTS; GAS DETECTORS; GASES; NANOLITHOGRAPHY; TIN OXIDES;

AREA/VOLUME RATIO; ELECTRICAL POWER CONSUMPTION; NANOSPIKE; NANOSTRUCTURED POLYMERS; POLYURETHANE POLYMER; SENSING SYSTEMS; SHARP STRUCTURE; THIN FILM SENSORS;

THIN FILMS;

EID: 79955394920     PISSN: 19475411     EISSN: 1947542X     Source Type: Journal    
DOI: 10.1080/19475411.2010.545451     Document Type: Article

References (27)

1. N. Yamazoe and N. Miura, New approaches in the design of gas sensors, in Gas Sensors: principle, Operation and Developments, G. Sberveglieri, ed., Kluwer Academic Publishers, 1992, pp. 1-42.
2. G. Sberveglieri, The workshop on new developments in semiconducting gas sensors, Sensor Actuator B Chem. 23 (1995), pp. 103-109.
3. 2 sensors: current status and future prospects, Sensor Actuator B Chem. 26 (1995), pp. 1-12.
4. 2 Thin Film Sensors, Jpn. J. Appl. Phys. 41 (2002), pp. L1002-L1005. (Pubitemid 35361508)
5. M. Schweizer-Berberich, J.G. Zheng, U. Weimar, W. Göpel, N. Bârsan, E. Pentia, and A. Tomescu, The effect of Pt and Pd surface doping on the response of nanocrystalline tin dioxide gas sensors to CO, Sensor Actuator B Chem. 31 (1996), pp. 71-75. (Pubitemid 126397503)
6. 2 gas sensor materials, Sensor Actuator B Chem. 61 (1999), pp. 23-32. (Pubitemid 30526209)
7. M. Valden, X. Lai, and D.W. Goodman, Onset of catalytic activity of gold clusters on titania with the appearance of nonmetallic properties, Science 281 (1998), pp. 1647-1650. (Pubitemid 28435574)
8. 3 with coprecipitated ultrafine particles of gold, Sensor Actuator 13 (1988), pp. 339-349. (Pubitemid 18597861)
9. 2-gas sensors: a comparison, Sensor Actuator B Chem. 78 (2001), pp. 6-11. (Pubitemid 32746187)
10. 2 gas sensor doped with palladium and platinum, Sensor Actuator B Chem. 103 (2004), pp. 111-114. (Pubitemid 40329194)
11. 2-based gas sensors: understanding of the chemical reactional mechanism, Thin Solid Film 436 (2003), pp. 1-8.
12. N. Yamazoe and N. Miura, Development of gas sensors for environmental protection, IEEE Trans. Compon. Packag. Manuf. Tech. 18 (1995), pp. 252-256.
13. S. Seal and S. Shukla, Nanocrystalline SnO gas sensors in view of surface reactions and modifications, J. Miner. Met. Mater. Soc. 54 (2002), pp. 35-38.
14. F. Menil, V. Coillard, and C. Lucat, Critical review of nitrogen monoxide sensors for exhaust gases of lean burn engines, Sensor Actuator B Chem. 67 (2000), pp. 1-23.
15. 2 thin film gas sensor fabricated on Si nanospikes, J. Nanosci. Nanotech. 9 (2009), pp. 4817-4819.
16. M.Y. Shen, C.H. Crouch, J.E. Carey, and E. Mazur, Femtosecond laser-induced formation of submicrometer spikes on silicon in water, Appl. Phys. Lett. 85 (2004), pp. 5694-5696. (Pubitemid 40162566)
17. M.Y. Shen, C.H. Crouch, J.E. Carey, R. Younkin, E. Mazur, M. Sheehy, and C.M. Friend, Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask, Appl. Phys. Lett. 82 (2003), pp. 1715-1717.
18. M.Y. Shen, J.E. Carey, C.H. Crouch, M. Kandyla, H.A. Stone, and E. Mazur, High-density regular arrays of nanometer-scale rods formed on silicon surfaces via femtosecond laser irradiation in water, Nano Lett. 8 (2008), pp. 2087-2091.
19. Y. Xia and G.M. Whiteside, Soft lithography, Annu. Rev. Mater. Sci. 28 (1998), pp. 153-184. (Pubitemid 128631417)
20. Q. Xu, B.T. Mayers, M. Lahav, D.V. Vezenov, and G.M. Whiteside, Approaching zero: using fractured crystals in metrology for replica molding, J. Am. Chem. Soc. 127 (2005), pp. 854-855. (Pubitemid 40144282)
21. B.D. Gates, Q. Xu, J.C. Love, D.B. Wolfe, and G.M. Whiteside, Unconventional nanofabrication, Annu. Rev. Mater. Res. 34 (2004), pp. 339-372.
22. H.B. Huo, C. Wang, H.Z. Ren, M. Johnson, and M.Y. Shen, Surface enhanced Raman scattering sensing with nanostructures fabricated by soft nanolithography, J. Macromol. Sci. Pure Appl. Chem. 46 (2009), pp. 1182-1184.
23. 2. Micro-Raman mapping and X-ray diffraction studies, J. Mater. Res. 13 (1998), pp. 2457-2460.
24. Carbon monoxide. Available at http://en.wikipedia.org/wiki/Carbon- monoxide.
25. O.R. Gilliam, C.M. Johnson, and W. Gordy, Microwave spectroscopy in the region from two to three millimeters, Phys. Rev. 78 (1950), pp. 140-144.
26. W. Kutzelnigg, Einführung in die Theoretische Chemie, Wiley-VCH, 2001.
27. 2 thin film gas sensor on polymer nanostructures, Proc. SPIE, 7647 (2010), 76474R.