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Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 8, 2009, Pages 4817-4819

Room temperature SnO 2 thin film gas sensor fabricated on Si nanospikes

(5) Huo, H B a Wang, C a Yan, F D a Ren, H Z a Shen, M Y a

a University of Massachusetts Lowell (United States)

Author keywords

CO gas; Silicon nanospike; Thin film sensor; Tin oxide

Indexed keywords

AREA/VOLUME RATIO; CO GAS; CO GAS SENSOR; FEMTOSECOND PULSED LASER IRRADIATION; FLAT SURFACES; NANOSTRUCTURED SURFACE; ROOM TEMPERATURE; SHARP STRUCTURE; THIN FILM GAS SENSORS; THIN FILM SENSOR;

CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; GASES; PULSED LASER APPLICATIONS; THIN FILM DEVICES; THIN FILMS; TIN;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 70350365506 PISSN: 15334880 EISSN: None Source Type: Journal
DOI: 10.1166/jnn.2009.1218 Document Type: Article

Times cited : (26)

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