Electronic and optical properties of indium zinc oxide thin films prepared by using nanopowder target

Japanese Journal of Applied Physics

Volumn 50, Issue 4 PART 1, 2011, Pages

  Kim, Hwa Min ^a   Bae, Kang ^a   Sohn, Sunyoung ^a  

^a Catholic University of Daegu   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PROPERTY; HIGH TRANSMITTANCE; INDIUM ZINC OXIDES; INDIUM-ZINC-OXIDE FILMS; LOW RESISTIVITY; MICRO-PARTICLES; MICROPOWDERS; NANO POWDERS; PACKING DENSITY; POWDER TARGET; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; VISIBLE RANGE;

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; INDIUM; NANOPARTICLES; NANOSTRUCTURED MATERIALS; OXIDE FILMS; REFRACTIVE INDEX; SURFACE ROUGHNESS; ZINC; ZINC OXIDE;

FILM PREPARATION;

EID: 79955159179     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.045801     Document Type: Article

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