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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 3, 2011, Pages

On the physical properties of In2 O3 films grown on (0001) sapphire substrates by atomic layer deposition

(5) Chi, Wei Hsu a Yen, Kuo Yi a Su, Hsin Lun a Li, Shao Cian a Gong, Jyh Rong a

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COATED SUBSTRATES; ELECTRON CONCENTRATION; HIGH ELECTRON MOBILITY; LOW TEMPERATURES; NITROUS OXIDE; OPTICAL TRANSMITTANCE; PLANE SAPPHIRE; ROOM TEMPERATURE; SAPPHIRE SUBSTRATES; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; TRIMETHYLINDIUM; TWIN BOUNDARIES; TWIN STRUCTURE;

ATOMIC LAYER DEPOSITION; ELECTRON MOBILITY; ELECTRONS; INDIUM; NITROGEN OXIDES; SAPPHIRE; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

OXIDE FILMS;

EID: 79955142028 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3549146 Document Type: Article

Times cited : (5)

References (16)

1
- 0031099608
- 0003-6951, 10.1063/1.118575
- C. C. Wu, C. I. Wu, J. C. Sturm, and A. Kahn, Appl. Phys. Lett. 0003-6951 70, 1348 (1997). 10.1063/1.118575
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1348
- Wu, C.C.¹ Wu, C.I.² Sturm, J.C.³ Kahn, A.⁴

2
- 0034734470
- 0927-0248, 10.1016/S0927-0248(00)00065-9
- K. Hara, T. Horiguchi, T. Kinoshita, K. Sayama, H. Sugihara, and H. Arakawa, Sol. Energy Mater. Sol. Cells 0927-0248 64, 115 (2000). 10.1016/S0927-0248(00)00065-9
- (2000) Sol. Energy Mater. Sol. Cells , vol.64 , pp. 115
- Hara, K.¹ Horiguchi, T.² Kinoshita, T.³ Sayama, K.⁴ Sugihara, H.⁵ Arakawa, H.⁶

3
- 38149054099
- 0925-4005, 10.1016/j.snb.2007.08.011
- M. Ali, Ch. Y. Wang, C. -C. Röhlig, V. Cimalla, Th. Stauden, and O. Ambacher, Sens. Actuators B 0925-4005 129, 467 (2008). 10.1016/j.snb.2007.08.011
- (2008) Sens. Actuators B , vol.129 , pp. 467
- Ali, M.¹ Wang, Ch.Y.² Röhlig, C.-C.³ Cimalla, V.⁴ Stauden, Th.⁵ Ambacher, O.⁶

4
- 33745609333
- 0021-8979, 10.1063/1.335730
- C. Falcony, J. R. Kirtley, D. J. Dimaria, T. P. Ma, and T. C. Chen, J. Appl. Phys. 0021-8979 58, 3556 (1985). 10.1063/1.335730
- (1985) J. Appl. Phys. , vol.58 , pp. 3556
- Falcony, C.¹ Kirtley, J.R.² Dimaria, D.J.³ Ma, T.P.⁴ Chen, T.C.⁵

5
- 33644857836
- 3 single-crystalline film on sapphire (0 0 0 1) substrate by molecular beam epitaxy
- DOI 10.1016/j.jcrysgro.2005.12.086, PII S0022024805015538
- Z. X. Mei, Y. Wang, X. L. Du, Z. Q. Zeng, M. J. Ying, H. Zheng, J. F. Jia, Q. K. Xue, and Z. Zhang, J. Cryst. Growth 0022-0248 289, 686 (2006). 10.1016/j.jcrysgro.2005.12.086 (Pubitemid 43374803)
- (2006) Journal of Crystal Growth , vol.289 , Issue.2 , pp. 686-689
- Mei, Z.X.¹ Wang, Y.² Du, X.L.³ Zeng, Z.Q.⁴ Ying, M.J.⁵ Zheng, H.⁶ Jia, J.F.⁷ Xue, Q.K.⁸ Zhang, Z.⁹

6
- 0033707504
- 0734-2101, 10.1116/1.582122
- Y. Yamada, N. Suzuki, T. Makino, and T. Yoshida, J. Vac. Sci. Technol. A 0734-2101 18, 83 (2000). 10.1116/1.582122
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 83
- Yamada, Y.¹ Suzuki, N.² Makino, T.³ Yoshida, T.⁴

7
- 0031547019
- 0169-4332, 10.1016/S0169-4332(96)00977-4
- A. W. Ott, J. M. Johnson, J. W. Klaus, and S. M. George, Appl. Surf. Sci. 0169-4332 112, 205 (1997). 10.1016/S0169-4332(96)00977-4
- (1997) Appl. Surf. Sci. , vol.112 , pp. 205
- Ott, A.W.¹ Johnson, J.M.² Klaus, J.W.³ George, S.M.⁴

8
- 0038110935
- 0925-4005, 10.1016/S0925-4005(03)00186-2
- J. Q. Hu, F. R. Zhu, J. Zhang, and H. Gong, Sens. Actuators B 0925-4005 93, 175 (2003). 10.1016/S0925-4005(03)00186-2
- (2003) Sens. Actuators B , vol.93 , pp. 175
- Hu, J.Q.¹ Zhu, F.R.² Zhang, J.³ Gong, H.⁴

9
- 0141703443
- 0020-1669, 10.1021/ic034588x
- T. Y. Chou, Y. Chi, S. F. Huang, C. S. Liu, A. J. Carty, L. Scoles, and K. A. Uclachin, Inorg. Chem. 0020-1669 42, 6041 (2003). 10.1021/ic034588x
- (2003) Inorg. Chem. , vol.42 , pp. 6041
- Chou, T.Y.¹ Chi, Y.² Huang, S.F.³ Liu, C.S.⁴ Carty, A.J.⁵ Scoles, L.⁶ Uclachin, K.A.⁷

10
- 0028548508
- 0013-4651, 10.1149/1.2059303
- T. Asikainen, M. Ritala, and A. Leskela, J. Electrochem. Soc. 0013-4651 141, 3210 (1994). 10.1149/1.2059303
- (1994) J. Electrochem. Soc. , vol.141 , pp. 3210
- Asikainen, T.¹ Ritala, M.² Leskela, A.³

11
- 0029393040
- 0013-4651, 10.1149/1.2050018
- T. Asikainen, M. Ritala, and A. Leskela, J. Electrochem. Soc. 0013-4651 142, 3538 (1995). 10.1149/1.2050018
- (1995) J. Electrochem. Soc. , vol.142 , pp. 3538
- Asikainen, T.¹ Ritala, M.² Leskela, A.³

12
- 33746863663
- 3 using cyclopentadienyl indium: A new synthetic route to transparent conducting oxide films
- DOI 10.1021/cm060754y
- J. W. Elam, A. B. F. Martinson, M. J. Pellin, and J. T. Hupp, Chem. Mater. 0897-4756 18, 3571 (2006). 10.1021/cm060754y (Pubitemid 44187547)
- (2006) Chemistry of Materials , vol.18 , Issue.15 , pp. 3571-3578
- Elam, J.W.¹ Martinson, A.B.F.² Pellin, M.J.³ Hupp, J.T.⁴

13
- 40049110891
- Atomic layer deposition of indium tin oxide thin films using nonhalogenated precursors
- DOI 10.1021/jp7097312
- J. W. Elam, D. A. Baker, A. B. F. Martinson, M. J. Pellin, and J. T. Hupp, J. Phys. Chem. C 112, 1938 (2008). 10.1021/jp7097312 (Pubitemid 351322065)
- (2008) Journal of Physical Chemistry C , vol.112 , Issue.6 , pp. 1938-1945
- Elam, J.W.¹ Baker, D.A.² Martinson, A.B.F.³ Pellin, M.J.⁴ Hupp, J.T.⁵

14
- 68449095202
- 0040-6090, 10.1016/j.tsf.2009.02.059
- O. Nilsen, R. Balasundaraprabhu, E. V. Monakhov, N. Muthukumarasamy, H. Fjellvag, and B. G. Svensson, Thin Solid Films 0040-6090 517, 6320 (2009). 10.1016/j.tsf.2009.02.059
- (2009) Thin Solid Films , vol.517 , pp. 6320
- Nilsen, O.¹ Balasundaraprabhu, R.² Monakhov, E.V.³ Muthukumarasamy, N.⁴ Fjellvag, H.⁵ Svensson, B.G.⁶

15
- 71749121194
- 0169-4332, 10.1016/j.apsusc.2009.08.067
- Y. T. Lin, P. H. Chung, H. W. Lai, H. L. Su, D. Y. Lyu, K. Y. Yen, T. Y. Lin, C. Y. Kung, and J. R. Gong, Appl. Surf. Sci. 0169-4332 256, 819 (2009). 10.1016/j.apsusc.2009.08.067
- (2009) Appl. Surf. Sci. , vol.256 , pp. 819
- Lin, Y.T.¹ Chung, P.H.² Lai, H.W.³ Su, H.L.⁴ Lyu, D.Y.⁵ Yen, K.Y.⁶ Lin, T.Y.⁷ Kung, C.Y.⁸ Gong, J.R.⁹

16
- 49749134681
- 0022-0248, 10.1016/j.jcrysgro.2008.06.075
- F. Yang, J. Ma, X. J. Feng, and L. Y. Kong, J. Cryst. Growth 0022-0248 310, 4054 (2008). 10.1016/j.jcrysgro.2008.06.075
- (2008) J. Cryst. Growth , vol.310 , pp. 4054
- Yang, F.¹ Ma, J.² Feng, X.J.³ Kong, L.Y.⁴

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