Stress development in amorphous zirconium oxide films prepared by sol-gel processing

Thin Solid Films

Volumn 338, Issue 1-2, 1999, Pages 136-141

  Brenier, R ^a   Urlacher, C ^a   Mugnier, J ^a   Brunel, M ^b  

^a UNIVERSITÉ LYON 1   (France)

^b LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

Sol gel; Stress; Zirconium oxide

Indexed keywords

ANNEALING; FILM PREPARATION; LASER BEAM EFFECTS; LIGHT REFLECTION; POLYCONDENSATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SOL-GELS; STRESS CONCENTRATION; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS; ZIRCONIA;

CURVATURE MEASUREMENT;

AMORPHOUS FILMS;

EID: 0032742003     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01092-X     Document Type: Article

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