메뉴 건너뛰기




Volumn 98, Issue 12, 2011, Pages

Interdiffusion and barrier layer formation in thermally evaporated Mn/Cu heterostructures on SiO2 substrates

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER LAYERS; CHEMICAL COMPOSITIONS; CU LAYERS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; HETEROSTRUCTURES; INTER-DIFFUSION; INTERFACIAL LAYER;

EID: 79953869868     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3569146     Document Type: Article
Times cited : (42)

References (14)
  • 3
    • 23744448019 scopus 로고    scopus 로고
    • Self-forming diffusion barrier layer in Cu-Mn alloy metallization
    • DOI 10.1063/1.1993759, 041911
    • J. Koike and M. Wada, Appl. Phys. Lett. 0003-6951 87, 041911 (2005). 10.1063/1.1993759 (Pubitemid 41117959)
    • (2005) Applied Physics Letters , vol.87 , Issue.4 , pp. 1-3
    • Koike, J.1    Wada, M.2
  • 4
    • 34547360019 scopus 로고    scopus 로고
    • 2 interface at 250-450°C
    • DOI 10.1063/1.2750402
    • M. Haneda, J. Iijima, and J. Koike, Appl. Phys. Lett. 0003-6951 90, 252107 (2007). 10.1063/1.2750402 (Pubitemid 47141206)
    • (2007) Applied Physics Letters , vol.90 , Issue.25 , pp. 252107
    • Haneda, M.1    Iijima, J.2    Koike, J.3
  • 10
    • 33744929908 scopus 로고    scopus 로고
    • Oxidation states of Mn and Fe in various compound oxide systems
    • DOI 10.1016/j.micron.2005.12.004, PII S0968432805002222
    • H. K. Schmid and W. Mader, Micron 0968-4328 37, 426 (2006). 10.1016/j.micron.2005.12.004 (Pubitemid 43850293)
    • (2006) Micron , vol.37 , Issue.5 , pp. 426-432
    • Schmid, H.K.1    Mader, W.2
  • 12
    • 0014719107 scopus 로고
    • 0001-6160, 10.1016/0001-6160(70)90075-1
    • H. Gleiter, Acta Metall. 0001-6160 18, 117 (1970). 10.1016/0001-6160(70) 90075-1
    • (1970) Acta Metall. , vol.18 , pp. 117
    • Gleiter, H.1
  • 13
    • 0027286944 scopus 로고
    • Study of diffusion of copper in thin films of silver and Ag-Al alloys as a function of increasing aluminium concentration
    • DOI 10.1016/0040-6090(93)90747-D
    • R. Roy and S. K. Sen, Thin Solid Films 0040-6090 223, 189 (1993). 10.1016/0040-6090(93)90747-D (Pubitemid 23623772)
    • (1993) Thin Solid Films , vol.223 , Issue.1 , pp. 189-195
    • Roy Rita1    Sen, S.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.