Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 736-739

  Zimmer, F ^a   Lapisa, M ^b   Bakke, T ^a,c   Bring, M ^a   Stemme, G ^b   Niklaus, F ^b  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^c SINTEF   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE SILICONS; DRIFT-FREE; FABRICATED DEVICE; FEASIBILITY STUDIES; HETEROGENEOUS SYSTEMS; HIGH-VOLTAGES; MEGA-PIXEL; MICRO MIRROR; MICROMIRROR ARRAY; SPATIAL LIGHT MODULATORS;

CRYSTALLINE MATERIALS; LIGHT MODULATION; LIGHT MODULATORS; MECHANICAL ENGINEERING; MECHANICAL PROPERTIES; MEMS; MIRRORS; PULSE CIRCUITS; REACTIVE ION ETCHING; SURFACE PROPERTIES; SURFACE ROUGHNESS;

MONOCRYSTALLINE SILICON;

EID: 79953793821     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734530     Document Type: Conference Paper

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