Micromirror array of monocrystalline silicon

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 128-129

  Bakke, Thor ^a   Völker, Benjamin ^a   Friedrichs, Martin ^a   Rudloff, Dirk ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; MIRRORS;

CREEP FREE ACTUATION; MICROMIRROR ARRAY;

SILICON COMPOUNDS;

EID: 41549146341     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708298     Document Type: Conference Paper

References (3)

1. U. B. Ljungblad et al. "A high-end mask writer using a spatial light modulator", Proc. SPIE, vol. 5721, Jan. 2005
2. A. Gehner et al., "Improved vision by eye aberration correction using an active-matrix-addressed micromirror array", Proc. SPIE, vol. 4985, Jan. 2003
3. T. Bakke et al., "Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding", Proc. SPIE, vol. 6114, Jan. 2006