Active Structural Error Suppression in MEMS Vibratory Gyroscopes

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1089-1094

  Painter, Chris C ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrostatic Trimming; MEMS; Rate Integrating Gyroscopes; Smart MEMS

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; DAMPING; ELASTICITY; FEEDBACK CONTROL; GYROSCOPES; STIFFNESS;

ELECTROSTATIC TRIMMING; RATE INTEGRATING GYROSCOPES; SMART MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542301523     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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2. W. A. Clark, Micromachined Vibratory Rate Gyroscopes. PhD thesis, UC Berkeley, 1997.
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5. A. Shkel and R. T. Howe, "Polysilicon Surface Micromachined Rate Integrating Gyroscopes." UC-Berkeley Office of Technology and Licensing. Case Number B99-077.
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9. T. Remtema and L. Lin, "Active Frequency Tuning for Microresonators by Localized Thermal Stressing Effects," in Solid-State Sensor and Actuator Workshop, pp. 363-366, Hilton Head Island, SC, June 2000.