Uniform tilt-angle micromirror array for multiobject spectroscopy

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 2, 2008, Pages

  Waldis, Severin ^a   Zamkotsian, Frederic ^b   Clerc, Pierre Andre ^a   Noell, Wilfried ^a   Zickar, Michael ^a   Lanzoni, Patrick ^a   De Rooij, Nico ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

Cryogenic environment; Deep reactive ion etching; Micro opto electromechanical systems; Micromirror; Mirror array; Multiobject spectroscopy

Indexed keywords

CRYOGENICS; ELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING; SILICON WAFERS; SINGLE CRYSTALS;

CRYOGENIC ENVIRONMENT; MICRO MIRROR; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MIRROR ARRAY; MULTIOBJECT SPECTROSCOPY;

MIRRORS;

EID: 79953722444     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2920338     Document Type: Conference Paper

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