Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5716, Issue , 2005, Pages 207-217

  Liotard, Arnaud ^a   Muratet, Sylvaine ^b   Zamkotsian, Frederic ^a   Fourniols, Jean Yves ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b LAAS CNRS   (France)

Author keywords

Adaptive optics; Deformable mirror; Phase shifting interferometer; Time averaged interferometry

Indexed keywords

ADAPTIVE OPTICS; FINITE ELEMENT METHOD; FORMABILITY; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; PHASE SHIFT; VIBRATION MEASUREMENT;

DEFORMABLE MIRROR; PHASE-SHIFTING INTERFEROMETER; TIME-AVERAGED INTERFEROMETRY; WAVE-FRONT CORRECTION SYSTEMS;

MIRRORS;

EID: 21844433999     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.592150     Document Type: Conference Paper

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