Uniform tilt-angle micromirror array for multi object spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6466, Issue , 2007, Pages

  Waldis, Severin ^a   Clerc, Pierre Andre ^a   Zamkotsian, Frederic ^b   Zickar, Michael ^a   Noell, Wilfried ^a   De Rooij, Nico ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

DRIE; Micromirror; Mirror array; MOEMS; Multi object spectroscopy

Indexed keywords

ASTRONOMY; LOW TEMPERATURE OPERATIONS; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

MICROMIRROR ARRAYS; MOEMS; MULTI OBJECT SPECTROSCOPY;

SPECTROGRAPHS;

EID: 34247345860     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.702012     Document Type: Conference Paper

References (8)

1. F. Burg, P. Bely, B. Woodruff, J. MacKenty, M. Stiavelli, S. Casertano, C. McCreight, and A. Huffman, "Yardstick integrated science instrument module concept for NGST," in Proceedings of the SPIE conference on Space Telescope and Instruments V, Proc. SPIE 3356, (Kona, Hawaii), 1998.
2. F. Zamkotsian, K. Dohlen, D. Burgarella, and V. Buat, "Aspects of MMA for MOS: optical modeling and surface characterization, spectrograph optical design," in Proceedings of the NASA conference on "NGST Science and Technology Exposition", ASP Conf. Ser. 207, (Hyannis, USA), 1999.
3. H. Moseley, S. Aslam, M. Baylor, K. Blumenstock, R. Boucarut, A. Erwin, R. Fettig, D. Franz, T. Hadjimichael, J. Kein, A. Kutyrev, D. M. M. Li, C. Monroy, and D. Schwinger, "Microshutter arrays for the NGST NIRSpec," in Proceedings of the SPIE conference on Astronomical Telescopes and Instrumentation 2002, Proc. SPIE 4850, (Hawaii, USA), 2002.
4. F. Zamkotsian and K. Dohlen, "Performance modeling of JWST near infrared multi-object spectrograph," in Proceedings of the SPIE conference on Astronomical Telescopes and Instrumentation 2004, Proc. SPIE 5487, (Glasgow, United Kingdom), 2004.
5. F. Zamkotsian, J. Gautier, and P. Lanzoni, "Characterization of MOEMS devices for the instrumentation of next generation space telescope," in Proceedings of the SPIE conference on MOEMS 2003, Proc. SPIE 4980, (San Jose, USA), 2003.
6. W. C. Young, Roark's Formulas for Stress and Strain, Me Graw Hill, New York, 8th edition ed., 1989.
7. S. Waldis, P.-A. Clerc, F. Zamkotsian, M. Zickar, W. Noell, and N. F. de Rooij, "High-fill factor micro-mirror array for multi object spectroscopy," in Proc. SPIE, 6114, pp. 65-76, 2006.
8. A. Liotard, S. Muratet, F. Zamkotsian, and J. Fourniols, "Static and dynamic MOEMS characterization by phase-shifting and time-averaged inteferometry," in Proceedings of the SPIE conference on MOEMS 2005, Proc. SPIE 5716, 2005.