High-fill factor micro-mirror array for multi object spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

  Waldis, Severin ^a   Clerc, Pierre Andre ^a   Zamkotsian, Frederic ^b   Zickar, Michael ^a   Noeil, Wilfried ^a   De Rooij, Nico ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

DRIE; Micromirror array; MOEMS; Multi object spectroscopy

Indexed keywords

ELECTRIC POTENTIAL; MICROMACHINING; MIRRORS; POLYSILICON; SPECTROSCOPIC ANALYSIS;

DRIE; MICRO SCANNING MIRROR; MOEMS; MULTI OBJECT SPECTROSCOPY;

ARRAYS;

EID: 33646173668     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.647493     Document Type: Conference Paper

References (8)

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