Characterization of ion beam sputtered ZrN coatings prepared at different substrate temperatures

Crystal Research and Technology

Volumn 46, Issue 4, 2011, Pages 351-356

  Larijani, M M ^a   Kiani, M ^b   Tanhayi, M ^b   Majdabadi, A ^a  

^a Nuclear Science and Technology Research Institute   (Iran)

^b ISLAMIC AZAD UNIVERSITY   (Iran)

Author keywords

AFM; RBS; resistivity; XRD; zirconium nitride

Indexed keywords

AFM; RBS; RESISTIVITY; XRD; ZIRCONIUM NITRIDE;

ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; ELECTRIC PROPERTIES; ION BEAMS; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; THICKNESS MEASUREMENT; X RAY DIFFRACTION; ZIRCONIUM;

COATINGS;

EID: 79953282523     PISSN: 02321300     EISSN: 15214079     Source Type: Journal    
DOI: 10.1002/crat.201100001     Document Type: Article

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