Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP)

Lab on a Chip

Volumn 11, Issue 8, 2011, Pages 1532-1540

  Shang, Jintang ^a   Chen, Boyin ^a   Lin, Wei ^b   Wong, Ching Ping ^b   Zhang, Di ^a   Xu, Chao ^a   Liu, Junwen ^a   Huang, Qing An ^a  

^a Southeast University   (China)

^b Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOAMING AGENT; GLASS; SILICON;

ARTICLE; CHEMICAL FOAMING PROCESS; DRUG DECOMPOSITION; FOAMING; GAS; MICRO TOTAL ANALYSIS SYSTEM; MICROBUBBLE; PREDICTION; PRIORITY JOURNAL; REACTOR;

EID: 79953187285     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/c0lc00708k     Document Type: Article

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