SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 87, Issue 10, 2010, Pages 1846-1851

Nanoimprint lithography fabrication of waveguide-integrated optical gratings with inexpensive stamps

(5) Grego, Sonia a Huffman, Alan a Lueck, Matthew a Stoner, Brian R a Lannon, John a

a RTI INTERNATIONAL (United States)

Author keywords

Anti adhesive layer; Grating; Optical waveguide; Stamp; Thermal nanoimprint lithography

Indexed keywords

LITHOGRAPHY; OPTICAL WAVEGUIDES; SILICON NITRIDE; STAMPING; WAVEGUIDES;

ANTI-ADHESIVE LAYERS; CHEMICAL FUNCTIONALIZATION; EVANESCENT WAVE SENSORS; GRATING; IMPRINT TEMPERATURE; PLANAR OPTICAL WAVEGUIDES; SILICON OXYNITRIDE WAVEGUIDES; THERMAL NANO-IMPRINT LITHOGRAPHIES;

NANOIMPRINT LITHOGRAPHY;

EID: 79953115793 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2009.11.003 Document Type: Article

Times cited : (17)

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