Roughness measurement of ultra precision surfaces using light scattering techniques and analysis

Optics InfoBase Conference Papers

Volumn , Issue , 2010, Pages

  Herffurth, Tobias ^a   Schröder, Sven ^a   Trost, Marcus ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ROUGHNESS MEASUREMENT; SURFACE ROUGHNESS;

CURVED SURFACES; LIGHT SCATTERING TECHNIQUES; ULTRA PRECISION;

LIGHT SCATTERING;

EID: 79952806075     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: 10.1364/oft.2010.otua5     Document Type: Conference Paper

References (10)

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2. A. Duparré, "Characterization of Surface and Thin-Film Roughness Using PSD Functions," in Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper OTuA5.
3. J. Stover, Optical Scattering-Measurement and Analysis, 2nd Ed., (SPIE-Press, Bellingham, Washington, 1995).
4. S. Schröder and A. Duparré, "Finish assessment of complex surfaces by advanced light scattering techniques," Proc. SPIE 7102, 71020F (2008).
5. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between Surface Scattering and Microtopographic Features," Opt. Eng. 18, 125-136, (1979).
6. S. Schröder, S. Gliech, and A. Duparré, "Sensitive and flexible light scatter techniques from the VUV to IR regions," Proc. SPIE 5965, 424-432, (2005).
7. S. Schröder, A. Duparré, and A. Tünnermann, "Roughness evolution and scatter losses of multilayers for 193 nm optics," Appl. Opt. 47, C88-C97 (2008).
8. S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, "EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates," Opt. Express 15, 13997-14012, (2007).
9. T. Feigl, S. Yulin, M. Perske, H. Pauer, M. Schurmann, N. Kaiser, N. R. Bowering, O. V. Khodykin, I. V. Fomenkov, and D. C. Brandt, "Enhanced reflectivity and stability of high-temperature LPP collector mirrors," Proc. SPIE 7077, 70771W (2008).
10. patent pending.