Finish assessment of complex surfaces by advanced light scattering techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7102, Issue , 2008, Pages

  Schröder, Sven ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Diamond turning; Polish; Power spectral density; Roughness; Scattering

Indexed keywords

DIAMONDS; LIGHT SCATTERING; REFRACTION; TURNING;

COMPLEX SURFACES; CURVED SURFACES; DIAMOND TURNING; EUV MIRRORS; MANUFACTURING METHODS; OPTICAL TECHNOLOGIES; POLISHED SURFACES; ROUGHNESS; SCATTERING MEASUREMENTS; SCATTERING TECHNIQUES; SURFACE FINISHES;

SCATTERING;

EID: 56249107247     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.797964     Document Type: Conference Paper

References (13)

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5. ISO 13696:2002, "Optics and optical instruments - Test methods for radiation scattered by optical components," International Organization for Standardization (2002)
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10. S. Schröder, "Light scattering of optical components at 193 nm and 13.5 nm", PhD thesis, Friedrich-Schiller-University Jena (2008)
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13. S. Schröder, M. Kamprath, S. Gliech, A. Duparré, "Scatter analysis of optical components from 193 nm to 13.5 nm", Proc. SPIE 5878, 232-240 (2005)