Introducing lanthanide aluminates as dielectrics for non-volatile memory applications: A material scientist's view

ECS Transactions

Volumn 33, Issue 3, 2010, Pages 31-42

  Adelmann, C ^a   Swerts, J ^a   Richard, O ^a   Conard, T ^a   Popovici, M ^a   Afanas'ev, V V ^b   Breuil, L ^a   Cacciato, A ^a   Opsomer, K ^a,c   Brijs, B ^a   Tielens, H ^a   Pourtois, G ^a   Bender, H ^a   Detavernier, C ^c   Jurczak, M ^a   Van Elshocht, S ^a   Kittl, J A ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BUDGET CONTROL; CRYSTALLIZATION; DIELECTRIC MATERIALS; GADOLINIUM COMPOUNDS; HIGH-K DIELECTRIC; LUTETIUM COMPOUNDS; NONVOLATILE STORAGE; PERMITTIVITY; RARE EARTH ELEMENTS;

CRYSTALLIZATION BEHAVIOR; DEVICE INTEGRATION; DEVICE PROCESSING; DIELECTRIC PERMITTIVITIES; MATERIAL SCIENTISTS; NON-VOLATILE MEMORY APPLICATION; NONVOLATILE MEMORY DEVICES; SURROUNDING MATERIALS;

ALUMINUM COMPOUNDS;

EID: 79952645557     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3481589     Document Type: Conference Paper

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