Reliability of the CFTM and GPA methods for strain analysis at ultra-thin layers

Micron

Volumn 42, Issue 5, 2011, Pages 392-400

  Chang, Wonjae ^a   Brown, T D ^a  

^a Michigan State University   (United States)

Author keywords

Computational Fourier Transform Moir ; Geometric Phase Analysis; High resolution transmission electron microscopy; Ultra thin layers

Indexed keywords

APPLIED STRAIN; COMPUTER-GENERATED IMAGES; FOURIER TRANSFORM MOIRE; FOURIER-FILTERING; GEOMETRIC PHASE ANALYSIS; HETERO INTERFACES; LEAKAGE EFFECTS; LOW RESOLUTION; MISMATCHED SYSTEMS; ORIGINAL IMAGES; SIGNIFICANT IMPACTS; STRAIN ANALYSIS; STRAINED LAYER SUPERLATTICE; ULTRA-THIN; ULTRATHIN LAYERS;

ELECTRON MICROSCOPY; FOURIER TRANSFORMS; GEOMETRY; IMAGE RESOLUTION; MATHEMATICAL TRANSFORMATIONS; QUALITY ASSURANCE; RELIABILITY ANALYSIS; THIN FILMS;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 79952625273     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2010.11.002     Document Type: Article

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