Determination of the nitrogen distribution in InGaNAs/GaAs quantum wells by transmission electron microscopy

Applied Physics Letters

Volumn 85, Issue 17, 2004, Pages 3743-3745

  Litvinov, D ^a   Gerthsen, D ^a   Rosenauer, A ^b   Hetterich, M ^a   Grau, A ^a   Gilet, Ph ^c   Grenouillet, L ^c  

^a UNIVERSITY OF KARLSRUHE   (Germany)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; HETEROJUNCTIONS; IMAGE ANALYSIS; LIGHT EMITTING DIODES; MOLECULAR BEAM EPITAXY; SEMICONDUCTING INDIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COMPOSITION EVALUATION BY LATTICE FRINGE ANALYSIS (CELFA); INGANAS; PLASMA SOURCE; RADIO FREQUENCY;

SEMICONDUCTOR QUANTUM WELLS;

EID: 9744272461     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1810643     Document Type: Article

References (14)

1. M. Weyers, M. Sato, and H. Ando, Jpn. J. Appl. Phys., Part 2 31, L853 (1992).
2. M. Kondow, K. Uomi, A. Niwa, T. Kitatani, S. Watahiki, and Y. Yazawa, Jpn. J. Appl. Phys., Part 1 35, 1273 (1996).
3. A. Pomarico, M. Lomascolo, R. Cingolani, A. Yu. Egorov, and H. Riechert, Semicond. Sci. Technol. 17, 145 (2002).
4. S. Nakatsuka, M. Kondow, M. Aoki, M. Kudo, T. Kitatani, and S. Tsuji, Jpn. J. Appl. Phys., Part 2 42, L1012 (2003).
5. M. Albrecht, V. Grillo, T. Remmele, H. P. Strunk, A. Yu. Egorov, Gh. Dumitras, H. Riechert, A. Kaschner, R. Heiz, and A. Hoffmann, Appl. Phys. Lett. 81, 2719 (2002).
6. V. Grillo, M. Albrecht, T. Remmele, H. P. Strunk, A. Yu. Egorov, and H. Riechert, J. Appl. Phys. 90, 3792 (2001).
7. A. Rosenauer and D. Gerthsen, Adv. Imaging Electron Phys. 107, 121 (1999); A. Rosenauer, Transmission Electron Microscopy of Semiconductor Nanostructures - An Analysis of Composition and Strain, Springer Tracts in Modern Physics Vol. 182 (Springer, Heidelberg, 2003).
8. A. Rosenauer and D. Gerthsen, Adv. Imaging Electron Phys. 107, 121 (1999); A. Rosenauer, Transmission Electron Microscopy of Semiconductor Nanostructures - An Analysis of Composition and Strain, Springer Tracts in Modern Physics Vol. 182 (Springer, Heidelberg, 2003).
9. M. Hetterich, A. Grau, A. Yu. Egorov, and H. Riechert, J. Appl. Phys. 94, 1810 (2003).
10. M. Hetterich, M. D. Dawson, A. Yu. Egorov, D. Bernklau, and H. Riechert, Appl. Phys. Lett. 76, 1030 (2000).
11. H. D. Sun, M. Hetterich, M. D. Dawson, A. Yu. Egorov, D. Bernklau, and H. Riechert, J. Appl. Phys. 92, 1380 (2002).
12. P. A. Stadelmann, Ultramicroscopy 51, 131 (1987).
13. I. A. Buyanova, W. M. Chen, and B. Monemar, MRS Internet J. Nitride Semicond. Res. 6, 2 (2001), and references therein.
14. P. R. C. Kent and A. Zunger, Phys. Rev. B 64, 115208 (2001).