Thermomechanical properties of polymer nanolithography using atomic force microscopy

Micron

Volumn 42, Issue 5, 2011, Pages 492-497

  Fang, Te Hua ^a   Wu, Cheng Da ^a   Kang, Shao Hui ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Friction; Nanoindentation; Nanolithography; Nanotribology; Polymer

Indexed keywords

ADHESION FORCES; ATOMIC FORCE MICROSCOPES; CONTACT FORCES; FORCE-DISTANCE CURVES; HEATING TEMPERATURES; REMOVAL RATE; ROOM TEMPERATURE; TEMPERATURE DEPENDENT; THERMOMECHANICAL PROPERTIES; WEAR DEPTH;

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; HEATING; MECHANICAL PROPERTIES; NANOINDENTATION; NANOLITHOGRAPHY; NANOTRIBOLOGY; POLYETHYLENE TEREPHTHALATES; THERMOPLASTICS;

POLYMERS;

EID: 79952618145     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2011.01.010     Document Type: Article

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