Growth, structure and properties of sputtered niobium oxide thin films

Thin Solid Films

Volumn 519, Issue 10, 2011, Pages 3068-3073

  Foroughi Abari, Ali ^a   Cadien, Kenneth C ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Niobium oxide; Optical properties; Oxygen; Reactive sputtering; Surface morphology; Thin films; X ray photoelectron spectroscopy

Indexed keywords

FILM PROPERTIES; FOUR POINT PROBE; OXIDE THIN FILMS; OXYGEN FLOW RATES; PULSED DC MAGNETRON SPUTTERING; STRUCTURE AND PROPERTIES; TOTAL GAS PRESSURE; TOTAL PRESSURE; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; ELECTRONS; MORPHOLOGY; NIOBIUM; OPTICAL PROPERTIES; OXIDE FILMS; OXYGEN; PHOTOELECTRICITY; PHOTONS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE MORPHOLOGY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

NIOBIUM OXIDE;

EID: 79952315684     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.12.036     Document Type: Article

References (18)

1. J.K. Hulm, C.K. Jones, R.A. Hein, and J.W. Gibson J. Low Temp. Phys. 7 1972 291
2. C.I. Wilson, C.R. Ellis, L.S. Salinas, and A.W. Lichtenberger IEEE Trans. Appl. Supercond. 9 1999 1724
3. M. Olszta, and E. Dickey Microsc. Microanal. 14 2008 451
4. S.H. Shin, T. Halpern, and P.M. Raccah J. Appl. Phys. 48 1977 3150
5. K. Sasaki, and R.R. Adzik J. Electrochem. Soc. 155 2008 B180
6. F. Lai, L. Lin, Z. Huang, R. Gai, and Y. Qu Appl. Surf. Sci. 253 2006 1801
7. K. Kukli, M. Ritala, and M. Leskelä J. Electrochem. Soc. 148 2001 F35
8. K.T. Jacob, C. Shekhar, and M. Vinay J. Chem. Eng. Data 2010 DOI: 10.1021/je1004609
9. S. Venkataraj, R. Drese, O. Kappertz, R. Jayavel, and M. Wuttig Phys. Status Solidi (a) 188 2001 1047
10. K. Yoshimura, T. Miki, S. Iwama, and S. Tanemura Thin Solid Films 235 1996 281
11. M. Krishna, and A. Bhattacharya Mater. Sci. Eng. B 86 2001 41
12. S. Venkataraj, R. Drese, O. Kappertz, R. Jayavel, and M. Wuttig J. Appl. Phys. 91 2002 4863
13. M. Ziolek, and I. Nowak Catal. Today 78 2003 543
14. S. Oswald, and W. Bruckner Surf. Interface Anal. 36 2004 17
15. M. Bizjak, A. Zalar, P. Panjan, B. Zorko, and B. Pracek Appl. Surf. Sci. 253 2007 3977
16. J.C. Vickerman, and I.S. Gilmore Surface Analysis: The Principal Techniques 2nd 2009 John Wiley and Sons Publishing Chichester, U.K. 40
17. M. Bouderbala, S. Hamzaoui, B. Amrani, A. Reshak, M. Adnane, T. Sahraoui, and M. Zerdali Phys. B 403 2008 3326
18. K. Seshan Handbook of Thin-film Deposition Processes and Techniques 2nd 2002 William Andrew Publishing/Noyes New York 262