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Volumn 86, Issue 1, 2001, Pages 41-47
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Processing and size effects on the optical properties of sputtered oxide thin films
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Author keywords
Optical properties; Size effect; Sputtering; Thin film
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Indexed keywords
ION BEAMS;
LIGHT ABSORPTION;
LIGHT EXTINCTION;
MAGNETRON SPUTTERING;
NIOBIUM COMPOUNDS;
REFRACTIVE INDEX;
SPUTTER DEPOSITION;
VANADIUM COMPOUNDS;
YTTERBIUM COMPOUNDS;
ION BEAM SPUTTERING (IBS);
NIOBIUM OXIDE;
VANADIUM OXIDE;
YTTERBIUM OXIDE;
OPTICAL FILMS;
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EID: 0035807097
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(01)00648-1 Document Type: Article |
Times cited : (31)
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References (37)
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