Effect of thickness on the structure, morphology and optical properties of sputter deposited Nb 2 O 5 films

Applied Surface Science

Volumn 253, Issue 4, 2006, Pages 1801-1805

  Lai, Fachun ^a   Lin, Limei ^a   Huang, Zhigao ^a   Gai, Rongquan ^a   Qu, Yan ^a  

^a FUJIAN NORMAL UNIVERSITY   (China)

Author keywords

Niobium oxide; Optical properties; Surface roughness; Thickness

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; REFRACTIVE INDEX; SPECTROPHOTOMETERS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION;

CRITICAL THICKNESS; CRYSTALLINE FILMS; EXTINCTION COEFFICIENT; NIOBIUM OXIDE;

NIOBIUM COMPOUNDS;

EID: 33751210087     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.03.014     Document Type: Article

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