Structuration of thin bridge and cantilever structures in thick-film technology using mineral sacrificial materials

5th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2009, CICMT 2009

Volumn , Issue , 2009, Pages 175-182

  Maeder, Thomas ^a   Jacq, Caroline ^a   Fournier, Yannick ^a   Hraiz, Wassim ^a   Ryser, Peter ^a  

^a EPFL   (Switzerland)

Author keywords

3D structuration; LTCC; Mineral sacrificial layers; Processing; Sensors; Thick film

Indexed keywords

CANTILEVER STRUCTURES; LTCC; LTCC (LOW TEMPERATURE CO-FIRED CERAMIC); MATERIALS AND PROCESS; SACRIFICIAL LAYER; STRUCTURATION; THERMAL AND CHEMICAL STABILITIES; THICK-FILM TECHNOLOGY;

CERAMIC MATERIALS; MICROSYSTEMS; MINERALS; NANOCANTILEVERS; PROCESSING; SENSORS; TECHNOLOGY;

MEMBRANES;

EID: 79952192566     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. White-NM Turner-JD, "Thick-film sensors: past, present and future,", Proceedings, 14th International Conference on Solid-State Sensors, Actuators and Microsystems-Transducers / Eurosensors'07, Lyon, France, 107-111, 2007.
2. T. Maeder, G. Affolter, N. Johner, G. Corradini, P. Ryser, "Optimisation of a thick-film 10...400 N force sensor,", Microelectronics Reliability Vol. 48 (6), 902-905, 2008.
3. K.A. Peterson, K.D. Patel, C.K. Ho, S.B. Rohde, C.D. Nordquist, C.A. Walker, B.D. Wroblewski, M. Okandan, "Novel microsystem applications with new techniques in low-temperature co-fired ceramics,", International Journal of Applied Ceramic Technology Vol. 2 (5), 345-363, 2005.
4. rd International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Denver, USA, THA13, 2007.
5. J.J. Santiago-Avilès, M. Gongora-Rubio, P. Espinoza-Vallejos, L. Sola-Laguna, "Sensors, actuators and other non-packaging applications of LTCC tapes,", Proceedings, 2004 IMAPS Conference, Ceramic Interconnect Technology, Denver, USA, INV12, 2004.
6. H. Birol, T. Maeder, P. Ryser, "Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels,", Journal of Micromechanics and Microengineering Vol. 17, 50-60, 2007.
7. C. Lucat, P. Ginet, F. Ménil, "New sacrificial layer based screen-printing process for free-standing thick-films applied to MEMS,", Journal of Microelectronics and Electronic Packaging Vol. 4 (3), 86-92, 2007.
8. C. Lucat, F. Ménil, H. Debéda-Hickel, P. Ginet, "Préparation de microcomposants multicouches par la méthode de la couche épaisse sacrificielle [Production of multilayer microcomponents by the sacrificial thick layer method],", French patent FR2'895'986, 2006 / international extension WO2007-077'397, 2007.
9. Y. Fournier, O. Triverio, T. Maeder, P. Ryser, "LTCC free-standing structures with mineral sacrificial paste,", Proceedings, International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Munich (DE), 11-18 (TA12), 2008.
10. T. Kotani, T. Nakanishi, K. Nomura, "Fabrication of a new pyroelectric infrared sensor using MgO surface micromachining,", Japanese Journal of Applied Physics Vol. 32, 6297-6300, 1993.
11. Y. Fournier, S. Wiedmer, T. Maeder, P. Ryser, "Capacitive micro force sensors manufactured with mineral sacrificial layers,", Proceedings, 16th IMAPS European Microelectronics & Packaging Conference (EMPC), Oulu, Finnland, 298-303, 2007.
12. 3 system,", Calphad Vol. 23 (1), 101-111, 1999.
13. T. Maeder, C. Jacq, Y. Fournier, P. Ryser, "Formulation and processing of screen-printing vehicles for sacrificial layers on thick-film and LTCC substrates,", Proceedings, XXXII International Conference of IMAPS Poland Chapter, Pu#tusk, Poland, B16, 2008.
14. M. Prudenziati, R. dell'Acqua, "Thick film resistors,", Handbook of Sensors and Actuators Vol. 1: Thick film sensors / ed. by M. Prudenziati, Elsevier, 85-97, 1994.
15. I.L. Trubnikov, "Thermal expansion and corrosion behavior of lead-borosilicate glasses,", Refractories and Industrial Ceramics Vol. 41 (5-6), 169-171, 2000.
16. 3,", Journal of the American Ceramic Society Vol. 58 (5-6), 196-197, 1975.
17. 3,", Journal of the American Ceramic Society Vol. 50 (2), 117-118, 1967.
18. 3-CuO system],", [Russian Journal of Inorganic Chemistry] Vol. 35 (1), 266-267, 1990.
19. D.E. Harrison, F.A. Hummel, "Phase equilibria and fluorescence in the system zinc oxide-boric oxide,", Journal of the Electrochemical Society Vol. 103 (9), 491-498, 1956.
20. H. Birol, T. Maeder, P. Ryser, "Preparation and application of minerals-based sacrificial pastes for fabrication of LTCC structures,", Proceedings, 4th European Microelectronics and Packaging Symposium, Terme 6ate7 (SI), IMAPS, 57-60, 2006.