Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels

Journal of Micromechanics and Microengineering

Volumn 17, Issue 1, 2007, Pages 50-60

  Birol, H ^a   Maeder, T ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC STRUCTURE; ELECTRONICS PACKAGING; HEATING RATE; MICROFLUIDICS; OXIDATION; SENSORS; SWELLING;

GRAPHITE OXIDATION; GRAPHITE-BASED SACRIFICIAL PASTE; LOW TEMPERATURE CO-FIRED CERAMIC; MICRO-PACKAGING;

CERAMIC MEMBRANES;

EID: 33947607404     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/1/007     Document Type: Article

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