LTCC free-standing structures with mineral sacrificial paste

4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008

Volumn , Issue , 2008, Pages 11-18

  Fournier, Y ^a   Triverio, O ^a   Maeder, T ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

Capacitive Force Sensor; Free standing Structures; LTCC; Mineral Paste; Sacrificial layers

Indexed keywords

CAPACITIVE FORCES; CHEMICAL DISSOLUTION; COMPLIANT MATERIALS; FREE-STANDING STRUCTURES; LTCC; MICROMECHANICAL STRUCTURES; SACRIFICIAL LAYER; THICK-FILM TECHNOLOGY;

ALUMINA; ANEMOMETERS; CERAMIC MATERIALS; DEFORMATION; ELECTROMECHANICAL DEVICES; MICROSYSTEMS; MINERALS; SENSORS; SHRINKAGE; SINTERING;

CAPACITIVE SENSORS;

EID: 84865974502     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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