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Volumn , Issue , 2007, Pages 107-111
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Advances in thick-film sensors
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Author keywords
Hybrid devices; Sensor technology; Thick film
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Indexed keywords
ACTUATORS;
COMPOSITE MICROMECHANICS;
COST EFFECTIVENESS;
ELECTROMECHANICAL DEVICES;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROSYSTEMS;
TRANSDUCERS;
COST-EFFECTIVE SOLUTIONS;
HYBRID DEVICES;
INTERNATIONAL CONFERENCES;
MECHANICAL TRANSDUCERS;
MICRO-ELECTRO MECHANICAL SYSTEMS;
SENSING PROBLEMS;
SENSOR TECHNOLOGY;
SOLID-STATE SENSORS;
THICK FILMS;
THICK-FILM;
SENSORS;
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EID: 50049108660
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2007.4300083 Document Type: Conference Paper |
Times cited : (12)
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References (7)
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