Capacitive micro force sensors manufactured with mineral sacrificial layers

16th European Microelectronics and Packaging Conference and Exhibition 2007, EMPC 2007

Volumn , Issue , 2007, Pages 293-298

  Fournier, Y ^a   Wiedmer, S ^a   Maeder, T ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

Capacitive; Force sensor; Mineral; Sacrificial layers; Thick film

Indexed keywords

BEAM DISPLACEMENT; CANTILEVER SENSORS; CAPACITIVE; CAPACITIVE ELECTRODES; FORCE SENSOR; MICRO-FORCE SENSORS; SACRIFICIAL LAYER; THICK FILM RESISTORS;

ALUMINA; EXHIBITIONS; MICROELECTRONICS; MINERALS; SENSORS; THICK FILMS;

CAPACITIVE SENSORS;

EID: 84875344053     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. H. Birol, M. Boers, T. Maeder, G. Corradini, P. Ryser, "Design and processing of low-range piezoresistive LTCC force sensors", Proceedings, XXIX International Conference of IMAPS Poland, Koszalin, pp. 385-388, 2005.
2. G. Stecher, "Free supporting structures in thickfilm technology: a substrate integrated pressure sensor", Proceedings, 8th European Microelectronics Conference, pp. 421-427, 1987.
3. H. Birol, T. Maeder, C. Jacq, P. Ryser, "3-D structuration of LTCC for sensor micro-fluidic applications", Proceedings, European Microelectronics and Packaging Symposium, Prague (CZ), 366-371, 2004.
4. H. Birol, T. Maeder, P. Ryser, "Preparation and application of minerals-based sacrificial pastes for fabrication of LTCC structures", Proceedings, 4th European Microelectronics and Packaging Symposium, Terme Catez (SI), IMAPS, 57-60, 2006.
5. H. Birol, T. Maeder, P. Ryser, "Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels", Journal of Micromechanics and Microengineering 17, 50-60, 2007.
6. K.A. Peterson, K.D. Patel, C.K. Ho, S.B. Rohde, C.D. Nordquist, C.A. Walker, B.D. Wroblewski, M. Okandan, "Novel microsystem applications with new techniques in lowtemperature co-fired ceramics", International Journal of Applied Ceramic Technology 2 (5), 345-363, 2005.
7. G. Stecher, K. Spitzenberger, K. Müller, "Pressure sensor", USA patent 4'382'247, 1983.
8. G. Stecher, H. Zimmermann-H, "Electrical thick-film free-standing, self-supporting structure, and method of its manufacture, particularly for sensors used with internal combustion engines", USA patent 4'410'872, 1983.